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Motion in Vacuum
SEMI SlotvalveSEMI Slotvalve, Detail

SLOT GATE VALVE

The VSE Vacuum Technology has invented and developed a very successfull particlefree Gate Valve, mainly designed as a Slot Valve for the useage in semiconductor facilities.

It has no moving or sliding parts inside, all moving parts like bearings, rollers, cylinders and others are outside of the vacuum and therefore without influence to particle generation. Therefore these moving parts can be greased. Not even guidance parts, rods or end sections for support are in the vacuum area. The system is strong enough to burden all forces.

Only a metal bellows and a valve plate are located in the evacuated volume. The valve plate and its sealing partner in the housing has no complicated threedimensional geometry.

In addition, this slot gatevalve has no pressurized elements like some pneumatic cylinders inside the vacuum volume. There is a clear separation between these two sensitive areas of operation.

Long lifetime, very low particle generation, compact outline dimensions, built according to SEMI-standards.

SLOT GATE VALVE

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